Clamp-on ultrasonic flow meters from U-F-M B.V. play an important role in the semicondcutor and electronics industry when it comes to non-invasive flow measurements in clean rooms.
Liquid flow processes are essential parts of the semiconductor and electronic component manufacturing industry. The fluids employed during the single production steps of semiconductors and printed circuit boards (PCB) are either corrosive or ultra-pure.
For these reasons, flow meters which are in no contact with the fluid and which can measure non-conductive media, are ideal solutions. Furthermore, retrofitting of a meter or carrying out spot measurements with portable devices should not require lines to be opened so costly downtimes and the risk of compromising the purity of cleanrooms can be avoided.
The U-F-M B.V. / Ultrasonic Flow Management clamp-on ultrasonic flow meters measure the velocity and volume flow of liquids regardless of their electric conductivity from the outside of the pipe. They can be used on pipes and flexible tubes of every common material and on diameters as small as 10 mm.
Wafer production and preperation
One key part of wafer production is CMP (Chemical Mechanical Planarisation). The U-F-M B.V. KATflow clamp-on ultrasonic flow meters can determine the volumes of the abrasive and corrosive slurry used during this process to grind flat and remove microscopic features on a wafer.
The portable and fixed-installation flow meters from U-F-M B.V. can also play an important role during wet cleaning which is carried out at numerous steps of semiconductor manufacturing. The U-F-M KATflow instruments can measure the flow of every liquid used durings this process which includes acids, solvents, surfactants and deionised water.
Circuit board manufacturing
The majority of printed circuit boards are made by bonding a layer of copper over the entire board from which subsequently unwanted copper is removed (subtractive method) leaving only the desired copper traces.
This method can be broken down into further techiques. During silk screen printing, for instance, the U-F-M B.V. KATflow instruments can be used to measure the volume flow of etch-resistant inks used to protect the copper foil. Furthermore, clamp-on meters such as the hand-held U-F-M KATflow 200 can also measure the amount of the acids used to remove the unwanted copper.
Another essential part in nearly every chemical process step of the PCB production is rinsing. It is often thought that this process requires little attention to function properly. However, ineffective rinsing can cause problems such as increasing the number of rejects and costs for waste water treatment.
Efficient rinsing offers several advantages. First of all, it will prolong bath life of solutions further down the production line. An effective rinsing system that effectively removes enough process solution can also decrease chemical costs, lower reject rates, and ease the burden on waste treatment systems. The clamp-on flow meters such as the hand-held U-F-M KATflow 200 are ideal tools to check the volumes of used rinsing liquids and therefore can give valuable information on how processes can be made more efficient.
Typical applications for the U-F-M KATflow clamp-on flow meters:
• Measurenment of precipitants, reducing and replacement agents
• Pump, valve and inline flow meter performance verification
• Measurement of waste water discharges
• Monitoring of hydrofluoric acid systems
• Ligands / complexing agents metering
• Metering of board rinsing systems
• Ultrapure water measurement